Aquarius® Deionized Water Heater Systems

Features & Benefits

  • Ultrapure PVDF/PFA wetted surfaces
  • High-resolution touch-screen
  • User-friendly graphical user interface (GUI)
  • Plug-and-play system with complete integration of controls
  • No N2purge required


Temperature Controls

  • Excellent temperature stability
  • Fast response to temperature and flow variations
  • Eliminates excessive overshoots and drops in temperature
  • Programmable logic controller (PLC) with Power-to-Flow™ control delivers constant, stable, and accurate temperature output
  • Ethernet read/write connection enables rapid transfer of heater data to fab SECS/GEM systems (other communications available)


Safety Features

  • Meets or exceeds stringent requirements for UL-499, SEMI S2, SEMI S3, and CE
  • Short Circuit Current Rating (SCCR) at 100 kA
  • Ground fault circuit interrupter (GFCI) system with a sub-30 mA rating
  • Redundant safety PLC monitoring for GFCI, thermal cut-off sensor, and hi-limit thermocouples
  • Redundant safety monitoring relay for door interlock switch and EMO
  • NIST-certified thermocouples
  • Dual-pressure relief valves for both input and output flows ensure rapid pressure dissipation
  • Ground options for electrical safety and DIW compatibility
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