M Tek/Semitool Spin Rinser Dryer (SRD)
- Cleaning, rinsing and drying of semiconductor wafers or photomasks after wet process or for effective chemical residue removal
- Capable of process up to 8″ High Profile or 12″ Low Profile wafer/cassette
- Available in Benchtop, Single Stack and Double Stack models:
- S Model SRD: 8300S/880S/870S/470S/280S/270S
- ST Mode SRD: ST-4300S/ST-2300/ST-470
- F Model: 2300-F/870-F/470-F/270-F
- Features: Brushes Motor, Non-Contact Labyrinth, Seal, Quick Disconnect Rotor, Electro polished Bowl Finish, High Uniform Spray Nozzle, and Ultra-pure teflon valve for optimum particle performance
Verteq Spin Rinser Dryer (SRD)
- Cleaning, rinsing and drying of semiconductor wafers or photomask after wet process for effective chemical residue removal
- Capable of process up to 8” wafer/cassette
- Available in Single Stack and Double Stack models:
- Model 1800-6 8″ SRD
- Model 1600-34/44, 1600-55 6″ SRD
- Features: Brushless Motor, Non-Contact Labyrinth Seal, RA-10 Finish Bowl Finish, High Uniform Spray Nozzle, Resistivity Monitor, and Ultra-pure teflon valve for optimum particle performance
SEMITOOL & VERTEQ SRD Spares
- Standard and custom 1 to 12” Rotors
- PSC-101 & PSC-102 SRD Controllers
- LC4+, LC5+ Motor Controllers
- Door Seals
- DIW Valves, Statics Eliminator, etc
- Customized 300mm Wafer Carrier
- Customized Cassettes & Inserts for wafers, discs and square substrates
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