R50/R54-Series Sheet Resistance Mapping

  • Tool Configurations: 4 Point-Probe (4PP) Dual Configuration / Eddy Current (EC)
  • Metal film and backside layer thickness measurements
  • Substrate resistivity
  • Sheet resistance
  • Thin film thickness or resistivity
  • Sheet and bulk conductivity

3D Profilometer: Profilm3D


  • Scanning range: 0nm – 10mm
  • PSI & WLI measurement modes
  • Color imaging option
  • Intuitive GUI
  • Step-height repeatability 0.1%
  • ISO 25178 compliant (roughness)
  • Best value-for-price in the market

F50 Film Thickness Measurement

  • Fast (within a 1 sec or less)
  • Non-contact
  • Accurate: 1nm or 0.2%
  • No preprocessing required (no step height needed)
  • Non-destructive
  • Spot size scalable (6mm – 1µm)

Single Spot Measurements

  • Measures film thickness and refractive index with a single mouse-click.
  • Measures thicknesses from 1nm to 13mm, multi-layer possible
  • Different probes for various surfaces


Spectral Reflectance, Refractive Index

Small Coupon

Solar Photovoltaics

Application Examples

Biomedical Devices

Medical Devices

Conformal Coatings on PCB

Automated Mapping

  • Fully-automatic mapping of thickness and index for nearly any sample shape.
  • Manual-load and robotic-load systems are available.
  • SECS-GEM capable
  • Automatic baseline, auto notch alignment
  • Average Reflectance Mapping


Mapping – spatial distribution

  • Typical Applications
  • Semiconductor films (SiO2, SiN, Poly-Si, a- Si, Photoresist, Polyimides)
  • Medical devices
  • Failure Analysis
  • Measure / Map / Monitor remaining Si thickness on Ics

In-line Monitoring

  • Measure film thickness in-line and in real-time e.g. moving films at up to seven locations with the F37.
  • Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system.
  • Sample rates as high as 100 Hz are possible at multiple measurement locations.

In-line Monitoring Examples

Plastic films

3 spot frame probe for inline measurements

R50/ R54 Applications

Rigid or flexible surfaces


Mapping Aluminum on Silicon

Semiconductor Manufacturing

  • Metal film deposition mapping
  • Ion implant process mapping
  • Sputter process mapping
  • Bulk Si dopant mapping


  • Sheet Resistance / Resistivity / Film Thickness
  • Coated optical components
  • Wearable technology/flexible conductive materials

Online surface metrology software

  • Cloud-based platform to view, analyze and share 3D surface data
  • Web browser- & apps-based (Android & iOS)
  • Support of various file types (Filmetrics, Keyence, Bruker, etc.)
  • Analyze step height, roughness, particles, dimensions
  • Join (for free) our 3D optical community and share your results with your colleagues: ProfilmOnline

Step height

Metal Depositions

  • Metal thickness
  • CVD, MOCVD, PVD, etc.

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