Accumeg™ Megasonic Cleaning Tanks & Systems

Quartz Megasonic Cleaning Tank

PVDF Megasonic Cleaning Tank

PVDF Megasonic Tank with Quick Dump Rinse


  • Reliable components, extensive 36 month warranty
  • Cassette & cassette-less designs for up to 300 mm wafers & larger substrates
  • Field replaceable transducer arrays
  • High watt density
  • Operates at 70°C


Megasonic Equipment Specifications
Megasonic Tank & Transducer Specifications
Model specific information is supplied with each system.

  • Megasonic Frequencies:975 & 730 kHz (+/-25 kHz) model dependent
  • Tank Materials:Quartz, PVDF, or PFA
  • Megasonic Transducer Plate:316L Electropolished or PFA PTFE coated Stainless
  • Megasonic Transducer Cables:25 ohm PTFE jacketed, 5 meter length
  • Maximum operating temperature for Boundary layer system:130°C*
  • Maximum operating temperature for direct systems:70°C
  • Operating Voltage:208-230 VAC +/- 10% single phase
  • Limited Warranty:36 months
  • Applicable Standards:Meets all applicable CE directives, 3rd party certified
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