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Model CMT-SR1000N/CMT-SR2000N

  • Measurement of up to 8” wafer.
  • Measuring range : 1 mΩ/sq ∼ 2 MΩ/sq (Resistivity : 10μohm.cm ~ 200Kohm.cm)‏
  • Accuracy : ± 0.5 % (VLSI Standard Wafer, at 23°C)
  • Repeatability [2σ] : ± 0.15 % (Precision Resistor)‏
  • 4-Point Probe Head : Jandel Engineering
  • Data down load software. Software for data mapping, contour map, 3-dimension map, etc ,on CMT-SR2000N

Model CMT-SR2000N-PV

  • Measurement of up to max. 162 x 162mm photovoltaic(solar) cell.
  • Measuring range : 1 mΩ/sq ∼ 2 MΩ/sq (Resistivity : 10μohm.cm ~ 200Kohm.cm)
  • Accuracy : ± 0.5 % (VLSI Standard Wafer, at 23°C)
  • Repeatability [2σ] : ± 0.15 % (Precision Resistor)
  • 4-Point Probe Head : Jandel Engineering
  • Software for data mapping, contour map, 3-dimension map, etc.

Model CMT-SR3000

  • Measurement of rectangular substrate up to 600 x 720mm.
  • Measuring range : 1 mΩ/sq ∼ 2 MΩ/sq (Resistivity : 10μohm.cm ~ 200Kohm.cm).
  • SAccuracy : ± 0.5 % (VLSI Standard Wafer, at 23°C).
  • Repeatability [2σ] : ± 0.15 % (Precision Resistor).
  • 4-Point Probe Head : Jandel Engineering Software for data mapping, contour map, 3-dimension map, etc.

Model CMT-SR5000N

  • Measurement of up to 300mm wafer or 210 x 210mm photovoltaic(solar) cell.
  • Measuring range : 1 mΩ/sq ∼ 2 MΩ/sq (Resistivity : 10μohm.cm ~ 200Kohm.cm)
  • Accuracy : ± 0.5 % (VLSI Standard Wafer, at 23°C)
  • Repeatability [2σ] : ± 0.15 % (Precision Resistor)
  • 4-Point Probe Head : Jandel Engineering Software for data mapping, contour map, 3-dimension map, etc
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