mobile-logo

Model: NEODR-200

  • The TLG-DY Series is a precision-engineered IPA/Marangoni dryer system, designed to meet the stringent cleanliness and drying standards of semiconductor wafer and photomask processing. Featuring Bernoulli-based non-contact drying, IPA vapor diffusion, and low DIW/IPA consumption, the system provides spotless, watermark-free drying for wafers ranging from 4″ to 8″ and photomasks.

Core Capabilities

  • Advanced Drying Technology
    • Bernoulli’s principle-based drying ensures minimal particle contact and excellent uniformity
    • IPA/N₂ vapor diffusion bar applies a stable surface tension gradient for efficient, watermark-free drying
  • Low Chemical & Water Consumption
    • Optimized rinsing with low DIW usage
    • Efficient IPA/N₂ bubbling system for minimal IPA waste
  • Spotless Drying Results
    • Dry wafers with no watermark, no haze, no particle adders
    • Designed for post-clean processes in wet benches or stand-alone operation
  • Intelligent IPA Handling
    • Quartz bubbler with integrated diffuser for safe and efficient vapor delivery
    • Dual-vaporization technology with built-in level and pressure sensors
    • Integrated flushing function for internal self-cleaning
  • Operator-Friendly Design
    • Manual cassette loading and unloading with smooth carrier movement
    • Ergonomic HMI panel, transparent chamber lid, and clear process flow

Wafer Processing Sequence

  1. Manual load Cassette with photo mask or wafer
  2. Cassette with photo mask or wafer descends into process bath
  3. Overflow rinse begins
  4. IPA/N2 drying cycle initiated
  5. Hot N2 purge follows
  6. Cassette with photo mask or wafer are dried and raised
  7. Manual unload Cassette with photo mask or wafer
  8. System returns to standby mode

Integrated with Industry-Leading Components

TLG benches integrate field-proven components trusted by major OEMs and fabs worldwide. We partner with the best in the industry to ensure long-term reliability, easy maintainability, and global supply chain support:

  • White Knight Heaters – High-purity, PFA/PTFE inline and immersion heaters, metal-free and leak-tight
  • Kaijo Megasonic Systems – Industry-standard megasonic transducers for gentle but effective particle removal
  • Genius Converging ARC Maglev Pumps – Frictionless, zero-particle magnetic levitation pumps for critical chemical circulation
  • KFPI Fire Suppression – Integrated safety systems designed for cleanroom fire protection and compliance

Customers gain full confidence knowing the same components used by large-scale OEMs are embedded in every TLG system.

Keen to know more about our products?
Contact Us